@misc{indiciae04a138ee89e6,
  title = {Scanning electron mirror microscopy and scanning electron microscopy of integrated circuits.},
  author = {Cline, J. E. and Morris, J. M. and Schwartz, S.},
  year = {1969},
  url = {https://ntrs.nasa.gov/citations/19690054902},
  note = {Source identifier: 19690054902}
}