@misc{indiciaea65d7b7982cb,
  title = {Development of ion implantation techniques for microelectronics},
  author = {Dunlap, H. L. and Hunsperger, R. G. and Marsh, O. J.},
  year = {1969},
  url = {https://ntrs.nasa.gov/citations/19700008009},
  note = {Source identifier: 19700008009}
}