@misc{indiciae72e78e6f8fd6,
  title = {Development of ion implantation techniques for microelectronics},
  author = {Dunlap, H. and Hart, R. and Hunsperger, R. G. and Marsh, O. J.},
  year = {1970},
  url = {https://ntrs.nasa.gov/citations/19710004054},
  note = {Source identifier: 19710004054}
}