@misc{indiciae557c6f297e17,
  title = {Apparatus and method for separating a semiconductor wafer Patent},
  author = {Litant, I. and Scapicchio, A. J.},
  year = {1970},
  url = {https://ntrs.nasa.gov/citations/19710004879},
  note = {Source identifier: 19710004879}
}