@misc{indiciaefda734710792,
  title = {Thick film silicon growth techniques},
  author = {Bates, H. E. and Cocks, F. H. and Mlavsky, A. I.},
  year = {1972},
  url = {https://ntrs.nasa.gov/citations/19720024089},
  note = {Source identifier: 19720024089}
}