@misc{indiciae5143839d6d49,
  title = {Thick film silicon growth techniques},
  author = {Bates, H. E. and Cocks, F. H. and Mlavsky, A. I. and Wald, F.},
  year = {1972},
  url = {https://ntrs.nasa.gov/citations/19720025068},
  note = {Source identifier: 19720025068}
}