@misc{indiciae9d3234a390be,
  title = {Method and apparatus for sputtering utilizing an apertured electrode and a pulsed substrate bias},
  author = {Przybyszewski, J. S. and Shaltens, R. K.},
  year = {1973},
  url = {https://ntrs.nasa.gov/citations/19730015842},
  note = {Source identifier: 19730015842}
}