@misc{indiciaed5f2de6c16fd,
  title = {Improved epitaxial process for fabricating silicon carbide semiconductor devices},
  author = {Will, H. A. and Powell, J. A.},
  year = {1974},
  url = {https://ntrs.nasa.gov/citations/19740000017},
  note = {Source identifier: 19740000017}
}