@misc{indiciaecb3653cac24e,
  title = {Fabrication of thick structures by sputtering},
  author = {Kazaroff, J. M. and Mcclanahan, E. D. and Busch, R. and Moss, R. W.},
  year = {1974},
  url = {https://ntrs.nasa.gov/citations/19740000126},
  note = {Source identifier: 19740000126}
}