TY  - RPRT
TI  - Fabrication of thick structures by sputtering
AU  - Kazaroff, J. M.
AU  - Mcclanahan, E. D.
AU  - Busch, R.
AU  - Moss, R. W.
PY  - 1974
UR  - https://ntrs.nasa.gov/citations/19740000126
ID  - 19740000126
ER  -