TY  - RPRT
TI  - A method for polycrystalline silicon delineation applicable to a double-diffused MOS transistor
AU  - Halsor, J. L.
AU  - Lin, H. C.
PY  - 1974
UR  - https://ntrs.nasa.gov/citations/19740000234
ID  - 19740000234
ER  -