@misc{indiciae0ef48c3f0ce9,
  title = {Low-temperture electrostatic silicon-to-silicon seals using sputtered borosilicate glass},
  author = {Hardesty, C. A. and Brooks, A. D. and Donovan, R. P.},
  year = {1975},
  url = {https://ntrs.nasa.gov/citations/19740000263},
  note = {Source identifier: 19740000263}
}