TY  - RPRT
TI  - Low-temperture electrostatic silicon-to-silicon seals using sputtered borosilicate glass
AU  - Hardesty, C. A.
AU  - Brooks, A. D.
AU  - Donovan, R. P.
PY  - 1975
UR  - https://ntrs.nasa.gov/citations/19740000263
ID  - 19740000263
ER  -