@misc{indiciae22e01093a100,
  title = {Electronmicroscopic evidence for a columnar-void-type structure in sputtered NbN films},
  author = {Wagner, W. and Ast, D. and Gavaler, J. R.},
  year = {1974},
  url = {https://ntrs.nasa.gov/citations/19740037647},
  note = {Source identifier: 19740037647}
}