TY  - RPRT
TI  - Electronmicroscopic evidence for a columnar-void-type structure in sputtered NbN films
AU  - Wagner, W.
AU  - Ast, D.
AU  - Gavaler, J. R.
PY  - 1974
UR  - https://ntrs.nasa.gov/citations/19740037647
ID  - 19740037647
ER  -