@misc{indiciae65ca3a6e5443,
  title = {Modeling of fluidized bed silicon deposition process},
  author = {Kim, K. and Hsu, G. and Lutwack, R. and PRATURI A. K.},
  year = {1977},
  url = {https://ntrs.nasa.gov/citations/19770021637},
  note = {Source identifier: 19770021637}
}