TY  - RPRT
TI  - Modeling of fluidized bed silicon deposition process
AU  - Kim, K.
AU  - Hsu, G.
AU  - Lutwack, R.
AU  - PRATURI A. K.
PY  - 1977
UR  - https://ntrs.nasa.gov/citations/19770021637
ID  - 19770021637
ER  -