@misc{indiciae9e83de0b6fe3,
  title = {X-ray topography as a process control tool in semiconductor and microcircuit manufacture},
  author = {Parker, D. L. and Porter, W. A.},
  year = {1977},
  url = {https://ntrs.nasa.gov/citations/19770023347},
  note = {Source identifier: 19770023347}
}