@misc{indiciae5b7936f04483,
  title = {CMOS circuit-fabrication handbook},
  author = {Bouldin, D. L. and Eastes, R. W. and Feltner, W. R. and Hollis, B. R. and Routh, D. E.},
  year = {1979},
  url = {https://ntrs.nasa.gov/citations/19790000148},
  note = {Source identifier: 19790000148}
}