@misc{indiciaed4a35f8328b6,
  title = {Multilayer metalization of MOS IC's},
  author = {Bouldin, D. L. and Feltner, W. R. and Hollis, B. R., Jr. and Routh, D. E.},
  year = {1980},
  url = {https://ntrs.nasa.gov/citations/19790000562},
  note = {Source identifier: 19790000562}
}