@misc{indiciae7ff1446251cf,
  title = {Multilevel metallization method for fabricating a metal oxide semiconductor device},
  author = {Hollis, B. R., Jr. and Feltner, W. R. and Bouldin, D. L. and Routh, D. E.},
  year = {1978},
  url = {https://ntrs.nasa.gov/citations/19790006735},
  note = {Source identifier: 19790006735}
}