TY  - RPRT
TI  - Multilevel metallization method for fabricating a metal oxide semiconductor device
AU  - Hollis, B. R., Jr.
AU  - Feltner, W. R.
AU  - Bouldin, D. L.
AU  - Routh, D. E.
PY  - 1978
UR  - https://ntrs.nasa.gov/citations/19790006735
ID  - 19790006735
ER  -