@misc{indiciaee9a67a8fcc95,
  title = {Silicon Web Process Development},
  author = {Duncan, C. S. and Seidensticker, R. G. and Hopkins, R. H. and Mchugh, J. P. and Hill, F. E. and Heimlich, M. E. and Driggers, J. M.},
  year = {1978},
  url = {https://ntrs.nasa.gov/citations/19790012111},
  note = {Source identifier: 19790012111}
}