@misc{indiciae6e8c7090a4e9,
  title = {Automated Array Assembly Task In-depth Study of Silicon Wafer Surface Texturizing},
  author = {Jones, G. T. and Rhee, S. S.},
  year = {1979},
  url = {https://ntrs.nasa.gov/citations/19800011338},
  note = {Source identifier: 19800011338}
}