@misc{indiciaeeac86e56f5b6, title = {Process feasibility study in support of silicon material task 1}, author = {Yaws, C. L. and Li, K. Y. and Hopper, J. R. and Fang, C. S. and Hansen, K. C.}, year = {1981}, url = {https://ntrs.nasa.gov/citations/19810011043}, note = {Source identifier: 19810011043} }