TY  - RPRT
TI  - Process feasibility study in support of silicon material task 1
AU  - Yaws, C. L.
AU  - Li, K. Y.
AU  - Hopper, J. R.
AU  - Fang, C. S.
AU  - Hansen, K. C.
PY  - 1981
UR  - https://ntrs.nasa.gov/citations/19810011043
ID  - 19810011043
ER  -