@misc{indiciaea664d746fa68,
  title = {Method of making V-MOS field effect transistors utilizing a two-step anisotropic etching and ion implantation},
  author = {Jhabvala, M. D.},
  year = {1981},
  url = {https://ntrs.nasa.gov/citations/19810017823},
  note = {Source identifier: 19810017823}
}