@misc{indiciae929bb3e01b84,
  title = {The MSFC complementary metal oxide semiconductor (including multilevel interconnect metallization) process handbook},
  author = {Bouldin, D. L. and Eastes, R. W. and Feltner, W. R. and Hollis, B. R. and Routh, D. E.},
  year = {1979},
  url = {https://ntrs.nasa.gov/citations/19810023842},
  note = {Source identifier: 19810023842}
}