@misc{indiciae9590634cef3d,
  title = {Hydrogenated amorphous silicon deposited by ion-beam sputtering},
  author = {Lowe, V. E. and Henin, N. and Tu, C.-W. and Tavakolian, H. and Sites, J. R.},
  year = {1981},
  url = {https://ntrs.nasa.gov/citations/19810049336},
  note = {Source identifier: 19810049336}
}