TY  - RPRT
TI  - Hydrogenated amorphous silicon deposited by ion-beam sputtering
AU  - Lowe, V. E.
AU  - Henin, N.
AU  - Tu, C.-W.
AU  - Tavakolian, H.
AU  - Sites, J. R.
PY  - 1981
UR  - https://ntrs.nasa.gov/citations/19810049336
ID  - 19810049336
ER  -