@misc{indiciaeb57dad737460,
  title = {Semiconductor technology program: Progress briefs},
  author = {Galloway, K. F. and Scace, R. I. and Walters, E. J.},
  year = {1981},
  url = {https://ntrs.nasa.gov/citations/19820022242},
  note = {Source identifier: 19820022242}
}