@misc{indiciaeb733b6ed17c9,
  title = {Silane Pyrolysis With Silicon-Seed Aerosol},
  author = {Flagan, R. C. and Alam, M. K.},
  year = {1984},
  url = {https://ntrs.nasa.gov/citations/19830000591},
  note = {Source identifier: 19830000591}
}