@misc{indiciae3d8d0794d3ef,
  title = {Silicon slicing by fixed abrasive slicing technique},
  author = {Schmid, F. and Khattak, C. P.},
  year = {1982},
  url = {https://ntrs.nasa.gov/citations/19830016759},
  note = {Source identifier: 19830016759}
}