TY  - RPRT
TI  - Test chips for custom ICs - Six kinds of test structures
AU  - Buehler, M. G.
AU  - Griswold, T. W.
AU  - Pina, C. A.
AU  - Timoc, C.
PY  - 1982
UR  - https://ntrs.nasa.gov/citations/19830030606
ID  - 19830030606
ER  -