@misc{indiciae51cfce8090f6,
  title = {Compositional depth profile of a native oxide LPCVD MNOS structure using X-ray photoelectron spectroscopy and chemical etching},
  author = {Wurzbach, J. A. and Grunthaner, F. J.},
  year = {1983},
  url = {https://ntrs.nasa.gov/citations/19830044844},
  note = {Source identifier: 19830044844}
}