TY  - RPRT
TI  - Compositional depth profile of a native oxide LPCVD MNOS structure using X-ray photoelectron spectroscopy and chemical etching
AU  - Wurzbach, J. A.
AU  - Grunthaner, F. J.
PY  - 1983
UR  - https://ntrs.nasa.gov/citations/19830044844
ID  - 19830044844
ER  -