@misc{indiciaef40282ad5089, title = {GaAs microwave devices and circuits with submicron electron-beam defined features}, author = {Wisseman, W. R. and Macksey, H. M. and Brehm, G. E. and Saunier, P.}, year = {1983}, url = {https://ntrs.nasa.gov/citations/19830055841}, note = {Source identifier: 19830055841} }