@misc{indiciaeba09aef0ef5b,
  title = {An enhanced sensitivity null ellipsometry technique for studying films on substrates - Application to silicon nitride on gallium arsenide},
  author = {Alterovitz, S. A. and Bu-Abbud, G. H. and Woollam, J. A. and Liu, D. C.},
  year = {1983},
  url = {https://ntrs.nasa.gov/citations/19830056400},
  note = {Source identifier: 19830056400}
}