TY  - RPRT
TI  - An enhanced sensitivity null ellipsometry technique for studying films on substrates - Application to silicon nitride on gallium arsenide
AU  - Alterovitz, S. A.
AU  - Bu-Abbud, G. H.
AU  - Woollam, J. A.
AU  - Liu, D. C.
PY  - 1983
UR  - https://ntrs.nasa.gov/citations/19830056400
ID  - 19830056400
ER  -