@misc{indiciae284d7c1ad8b4, title = {Techniques for improving the Si-SiO2 interface characterization}, author = {Sher, A. and Hoffman, H. J. and Su, P. and Tsuo, Y. H.}, year = {1983}, url = {https://ntrs.nasa.gov/citations/19830065057}, note = {Source identifier: 19830065057} }