@misc{indiciaec9757f275e7e, title = {High-Mobility Epitaxial Silicon Wafers}, author = {Stermer, R. L., Jr and Fripp, A. L., Jr. and Jones, A. and Mcmullen, J. and Manasevit, H. and Gergis, I. and Soclof, S.}, year = {1985}, url = {https://ntrs.nasa.gov/citations/19840000175}, note = {Source identifier: 19840000175} }