@misc{indiciae599c48c7462e, title = {NASA metrology information system: A NEMS subsystem}, author = {German, E. S., Jr. and Kern, F. A. and Yow, R. P. and Peterson, E.}, year = {1984}, url = {https://ntrs.nasa.gov/citations/19840025208}, note = {Source identifier: 19840025208} }