@misc{indiciae7e40c5c5b93d,
  title = {Current understanding of point defects and diffusion processes in silicon},
  author = {Tan, T. Y. and Goesele, U.},
  year = {1985},
  url = {https://ntrs.nasa.gov/citations/19850023319},
  note = {Source identifier: 19850023319}
}