TY - RPRT TI - Electron lithography STAR design guidelines. Part 3: The mosaic transistor array applied to custom microprocessors. Part 4: Stores logic arrays, SLAs implemented with clocked CMOS AU - Trotter, J. D. PY - 1982 UR - https://ntrs.nasa.gov/citations/19850023529 ID - 19850023529 ER -