@misc{indiciaec3eeb24eec53,
  title = {Layered synthetic microstructure technology considerations for the extreme ultraviolet},
  author = {Keski-Kuha, R. A. M.},
  year = {1984},
  url = {https://ntrs.nasa.gov/citations/19850029103},
  note = {Source identifier: 19850029103}
}