@misc{indiciae5da2a993d229,
  title = {Sputtering processes - Erosion and chemical change},
  author = {Johnson, R. E. and Lanzerotti, L. J. and Brown, W. L.},
  year = {1984},
  url = {https://ntrs.nasa.gov/citations/19850049656},
  note = {Source identifier: 19850049656}
}