TY  - RPRT
TI  - Sputtering processes - Erosion and chemical change
AU  - Johnson, R. E.
AU  - Lanzerotti, L. J.
AU  - Brown, W. L.
PY  - 1984
UR  - https://ntrs.nasa.gov/citations/19850049656
ID  - 19850049656
ER  -