@misc{indiciaec54788624d35, title = {Planar techniques for fabricating X-ray diffraction gratings and zone plates}, author = {Smith, H. I. and Anderson, E. H. and Hawryluk, A. M. and Schattenburg, M. L.}, year = {1984}, url = {https://ntrs.nasa.gov/citations/19850061124}, note = {Source identifier: 19850061124} }