TY - RPRT TI - Planar techniques for fabricating X-ray diffraction gratings and zone plates AU - Smith, H. I. AU - Anderson, E. H. AU - Hawryluk, A. M. AU - Schattenburg, M. L. PY - 1984 UR - https://ntrs.nasa.gov/citations/19850061124 ID - 19850061124 ER -