@misc{indiciae72f63f33a963,
  title = {Improvements in Ionized Cluster-Beam Deposition},
  author = {Fitzgerald, D. J. and Compton, L. E. and Pawlik, E. V.},
  year = {1986},
  url = {https://ntrs.nasa.gov/citations/19860000092},
  note = {Source identifier: 19860000092}
}